Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 1999
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(99)00460-0